OnTool DryPumpTM
Dry Pump that Attaches Directly to your System.
Cost-effective. Rugged. Flexible.
Kompakte, robuste Trockene Pumpe mit einem Saugvermögen von 84 m3/h. Besonders für den Einsatz in der Halbleitertechnik, für Laboranwendungen sowie für Anwendungen in der Beschichtungsindustrie geeignet.
Advantages at a glance
- Compact, multi-stage dry pump
- Significant initial cost savings through installation directly to the system
- High process throughputs, low leakage rates
- Reduced contamination due to soft pumping capability
- No fore-vacuum lines (heated) required
- High level of reliability due to contactless, wear-free seal
Applications
- Physical vapor deposition (PVD)
- Chemical vapor deposition (CVD)
- Etching
- EUV lithography
- Plasma coating
- Thermal evaporation
- Laboratory applications
- Vacuum funaces
- Load-locks