Break through inventions like the transistor, of which there are millions
on one of today’s integrated circuits, could not be developed and manufactured without vacuum technology. Semiconductors are widely used in mobile phones, digital cameras, MP3 and DVD players, flat panel screens and TVs, computers, mobile storage devices (flash memory), consumer electronics, automobiles and lots of other applications.

 

Pfeiffer Vacuum primarily supplies turbo pumps for coating (CVD, PVD), layer structuring (lithography and etching) and for modifying layer properties (ion implantation). Electron beam systems (SEM and SLM) are used in the field of wafer inspection and defect repairs, which also use turbo pumps from Pfeiffer Vacuum for high vacuum generation. Moreover, numerous load/lock, transport and transfer chambers in semiconductor production systems are equipped with turbo pumps from Pfeiffer Vacuum.

 

Pfeiffer Vacuum benefits with innovative and most reliable products from this positive development in this highly dynamic market segment.

 

Fields of application for our products: