Electron Microscopy and Surface Analysis

Vacuum Solutions for Electron Microscopy and Surface Analysis
 
Electron microscopy and surface analysis are methods of measurements for qualitative assessment of material and surface structures with the aid of electron beams and subsequent optical post-magnification. It makes for materials and surface analysis or quality assurance in the semiconductor industry. In this application, special requirements are necessary for extremely low vibration levels and highest reliability which are key to Pfeiffer Vacuum products. Compared to ordinary light microscopes significantly higher magnifications and resolutions are possible with these exciting techniques.
 
Main fields of application for our products are:
 
  • Lamma
  • Electron Microscopy
  • Sims
  • Auger
  • REM
  • SEM
  • EDX
  • TEM
 
Our products are used for:
 
Vacuum generation
Vacuum measurement
 
Quantitative analysis

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